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[IEEE Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - Orlando, FL, USA (1999.01.21-1999.01.21)] Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291) - EFAB: rapid, low-cost desktop micromachining of high aspect ratio true 3-D MEMS
Cohen, A., Zhang, G., Tseng, F.-G., Frodis, U., Mansfeld, F., Will, P.Year:
1999
Language:
english
DOI:
10.1109/memsys.1999.746824
File:
PDF, 1.33 MB
english, 1999