Intrinsic reoxidation of microwave plasma-nitrided gate dielectrics
H. N. Alshareef, H. Niimi, A. Varghese, M. Bevan, R. Kuan, J. Holt, P. Tiner, R. KhamankarYear:
2005
Language:
english
DOI:
10.1063/1.1895486
File:
PDF, 317 KB
english, 2005