Impact of metal etch residues on etch species density and...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2010 Vol. 28; Iss. 4

Impact of metal etch residues on etch species density and uniformity

Dictus, Dries, Shamiryan, Denis, Paraschiv, Vasile, Boullart, Werner, De Gendt, Stefan, Vinckier, Chris
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3456619
File:
PDF, 623 KB
english, 2010
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