Erratum: ‘‘Study of the effect of boron doping on the aging of micromachined silicon cantilevers’’ [Appl. Phys. Lett. 66, 577 (1995)]
A. Pember, J. Smith, H. KemhadjianYear:
1995
Language:
english
DOI:
10.1063/1.114226
File:
PDF, 296 KB
english, 1995