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Investigation of the interface reactions of Ti thin films with AlN substrate
He, Xiangjun, Yang, Si-Ze, Tao, Kun, Fan, YudianVolume:
12
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1997.0123
Date:
March, 1997
File:
PDF, 199 KB
english, 1997