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Electrical and optical characterization of SiONC dielectric thin film deposited by polymer-source chemical vapor deposition
E. H. Oulachgar, C. Aktik, M. Scarlete, S. Dostie, R. Sowerby, S. GujrathiYear:
2007
Language:
english
DOI:
10.1063/1.2717607
File:
PDF, 333 KB
english, 2007