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Micromachined optical microphone structures with low thermal-mechanical noise levels
Hall, Neal A., Okandan, Murat, Littrell, Robert, Bicen, Baris, Degertekin, F. LeventVolume:
122
Year:
2007
Language:
english
Journal:
The Journal of the Acoustical Society of America
DOI:
10.1121/1.2769615
File:
PDF, 832 KB
english, 2007