Fabrication of GaN nanodots via GaN thermal decomposition...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2013 Vol. 31; Iss. 5

Fabrication of GaN nanodots via GaN thermal decomposition in H2 atmosphere

Hui, Xiong, Zhang, Jin, Li, Senlin, Wang, Hu, Fang, Yanyan, Dai, Jiangnan, Chen, Changqing
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4819128
File:
PDF, 3.64 MB
english, 2013
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