Diffusion of TiN into aluminum films measured by soft x-ray spectroscopy and Rutherford backscattering spectroscopy
T. M. Schuler, D. L. Ederer, N. Ruzycki, G. Glass, W. A. Hollerman, A. Moewes, M. Kuhn, T. A. CallcottYear:
2001
Language:
english
DOI:
10.1116/1.1382875
File:
PDF, 470 KB
english, 2001