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Bidirectional Electrothermal Actuator With Z-Shaped Beams
Zhu, Yong, Moheimani, S. O. Reza, Yuce, Mehmet RasitVolume:
12
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2012.2194141
Date:
July, 2012
File:
PDF, 791 KB
english, 2012