Al+ Implanted 4H-SiC: Improved Electrical Activation and...

Materials Science Forum 2013 / 1 Vol. 740-742

Al+ Implanted 4H-SiC: Improved Electrical Activation and Ohmic Contacts

Nipoti, Roberta, Hallén, Anders, Parisini, Antonella, Moscatelli, Francesco, Vantaggio, Salvatore
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.740-742.767
Date:
January, 2013
File:
PDF, 485 KB
english, 2013
Conversion to is in progress
Conversion to is failed