Influence of boron on radiation enhanced diffusion of...

Journal of Applied Physics 2002 Vol. 91; Iss. 7

Influence of boron on radiation enhanced diffusion of antimony in delta-doped silicon

Lévêque, P., Christensen, J. S., Kuznetsov, A. Yu., Svensson, B. G., Larsen, A. Nylandsted
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
91
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1448896
File:
PDF, 315 KB
english, 2002
Conversion to is in progress
Conversion to is failed