X-ray reflectivity of an Sb delta-doping layer in silicon

Journal of Applied Physics 1990 Vol. 68; Iss. 10

X-ray reflectivity of an Sb delta-doping layer in silicon

Slijkerman, W. F. J., Gay, J. M., Zagwijn, P. M., van der Veen, J. F., Macdonald, J. E., Williams, A. A., Gravesteijn, D. J., van de Walle, G. F. A.
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Volume:
68
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.347047
File:
PDF, 665 KB
english, 1990
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