One step processing of aminofunctionalized gate oxides
M. Arroyo-Hernández, Miguel Manso-Silvan, E. López-Elvira, A. Muñoz, A. Climent, J.M. Martínez DuartVolume:
22
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.bios.2006.10.039
File:
PDF, 327 KB
english, 2007