Sharp phosphorus spikes in silicon grown by fast...

Applied Physics Letters 1991 Vol. 59; Iss. 25

Sharp phosphorus spikes in silicon grown by fast gas-switching chemical vapor deposition at reduced and atmospheric pressure

Roksnoer, P. J., Maes, J. W. F. M., Vink, A. T., Vriezema, C. J., Zalm, P. C.
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Volume:
59
Year:
1991
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.105711
File:
PDF, 706 KB
english, 1991
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