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[IEEE 2012 IEEE International Ultrasonics Symposium - Dresden, Germany (2012.10.7-2012.10.10)] 2012 IEEE International Ultrasonics Symposium - On the optimization of piezoelectrically actuated MEMS resonators
Frangi, Attilio, Cremonesi, Massimiliano, Jaakkola, Antti, Pensala, TuomasYear:
2012
Language:
english
DOI:
10.1109/ultsym.2012.0261
File:
PDF, 1.34 MB
english, 2012