Effects of collimator aspect ratio and deposition...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1999 Vol. 17; Iss. 4

Effects of collimator aspect ratio and deposition temperature on copper sputtered seedlayers

Cooney, E. C., Strippe, D. C., Korejwa, J. W., Simon, A. H., Uzoh, C.
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581701
File:
PDF, 1.67 MB
english, 1999
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