Hydrogen-implantation-induced damage in silicon

Physical Review B 1987 / 7 Vol. 36; Iss. 2

Hydrogen-implantation-induced damage in silicon

Keinonen, J., Hautala, M., Rauhala, E., Erola, M.
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Volume:
36
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.36.1344
Date:
July, 1987
File:
PDF, 171 KB
english, 1987
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