ITEP MEVVA ion beam for rhenium silicide production

ITEP MEVVA ion beam for rhenium silicide production

Kulevoy, T., Gerasimenko, N., Seleznev, D., Kropachev, G., Kozlov, A., Kuibeda, R., Yakushin, P., Petrenko, S., Medetov, N., Zaporozhan, O.
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Volume:
81
Year:
2010
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3264636
File:
PDF, 684 KB
english, 2010
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