Trench filling by ionized metal physical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2001 Vol. 19; Iss. 5

Trench filling by ionized metal physical vapor deposition

Lu, Junqing, Kushner, Mark J.
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Volume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1399318
File:
PDF, 1.09 MB
english, 2001
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