Optical-softlithographic technology for patterning on...

Optical-softlithographic technology for patterning on curved surfaces

Kim, J G, Takama, N, Kim, B J, Fujita, H
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Volume:
19
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/19/5/055017
Date:
May, 2009
File:
PDF, 2.04 MB
english, 2009
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