At the limit of total silane gas utilization for preparation of high-quality microcrystalline silicon solar cells at high-rate plasma deposition
Gordijn, A., Pollet-Villard, A., Finger, F.Volume:
98
Year:
2011
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3593377
File:
PDF, 347 KB
english, 2011