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Time resolved study of a reactive low pressure plasma: Determination of basic data on electron-fluorine collisions
Elyaakoubi, Mustapha, Ranson, PierreVolume:
78
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.360743
File:
PDF, 1.04 MB
english, 1995