Influence of plasma density on the chemical composition and...

Physics of Plasmas 2014 / 05 Vol. 21; Iss. 5

Influence of plasma density on the chemical composition and structural properties of pulsed laser deposited TiAlN thin films

Quiñones-Galván, J. G., Camps, Enrique, Muhl, S., Flores, M., Campos-González, E.
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Volume:
21
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.4879025
Date:
May, 2014
File:
PDF, 1.27 MB
english, 2014
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