Mechanism of C[sub 4]F[sub 8] dissociation in parallel-plate-type plasma
Hayashi, Hisataka, Morishita, Satoshi, Tatsumi, Tetsuya, Hikosaka, Yukinobu, Noda, Shuichi, Nakagawa, Hideo, Kobayashi, Shoji, Inoue, Masami, Hoshino, TyujiVolume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581997
File:
PDF, 791 KB
english, 1999