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[IEEE 2011 Winter Simulation Conference - (WSC 2011) - Phoenix, AZ, USA (2011.12.11-2011.12.14)] Proceedings of the 2011 Winter Simulation Conference (WSC) - Implementing Virtual Metrology into semiconductor production processes - an investment assessment
Koitzsch, Matthias, Merhof, Jochen, Michl, Markus, Noll, Humbert, Nemecek, Alexander, Honold, Alfred, Kleineidam, Gerhard, Lebrecht, HolgerYear:
2011
Language:
english
DOI:
10.1109/wsc.2011.6147915
File:
PDF, 697 KB
english, 2011