![](/img/cover-not-exists.png)
Direct-current-magnetron deposition of molybdenum and tungsten with rf-substrate bias
Bensaoula, A.Volume:
2
Year:
1984
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.572749
File:
PDF, 568 KB
english, 1984