ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Investigating the Compatibility of Ruthenium Liners with Copper Interconnects
Tamboli, Dnyanesh, Osso, Oriol, McEvoy, Todd, Vega, Lourdes, Rao, Madhukar, Banerjee, G.Year:
2010
Language:
english
DOI:
10.1149/1.3489059
File:
PDF, 640 KB
english, 2010