Force Driving Cu Diffusion into Interlayer Dielectrics
Fukuda, Takuya, Nishino, Hirotaka, Matsuura, Azuma, Matsunaga, HironoriVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.L537
Date:
May, 2002
File:
PDF, 123 KB
english, 2002