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[IEEE 2012 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) - Graz, Austria (2012.05.13-2012.05.16)] 2012 IEEE International Instrumentation and Measurement Technology Conference Proceedings - An air-bearing displacement sensor for nanometrology of surface forms
Lee, Kang-Won, Ito, So, Shimizu, Yuki, Gao, Wei, Tanaka, Katsutoshi, Fukuta, Masahiko, Kai, YoshiakiYear:
2012
Language:
english
DOI:
10.1109/i2mtc.2012.6229158
File:
PDF, 1.10 MB
english, 2012