SiC formation at the interface of polyimide...

Journal of Applied Physics 1996 Vol. 80; Iss. 4

SiC formation at the interface of polyimide Langmuir–Blodgett film and silicon

Ji, Mingrong, Zhu, Jingsheng, Ma, Maosheng, Wu, Jianxin, Liu, Xianming, Jin, Bangkun, Yang, Beifang, He, Pingsheng, Ruan, Yaozhong
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Volume:
80
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.363047
File:
PDF, 328 KB
english, 1996
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