Selective vapor-phase deposition on patterned substrates

Critical Reviews in Solid State and Material Sciences 1990 / 01 Vol. 16; Iss. 3

Selective vapor-phase deposition on patterned substrates

Carlsson, Jan-Otto
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Volume:
16
Language:
english
Journal:
Critical Reviews in Solid State and Materials Sciences
DOI:
10.1080/10408439008244628
Date:
January, 1990
File:
PDF, 7.73 MB
english, 1990
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