Characteristics of leakage current in the dielectric layer due to Cu migration during bias temperature stress
Hwang, Sang-Soo, Jung, Sung-Yup, Joo, Young-ChangVolume:
104
Year:
2008
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2973154
File:
PDF, 959 KB
english, 2008