Influence of ion-bombardment cleaning on the aging rates in...

Influence of ion-bombardment cleaning on the aging rates in island copper films on fused quartz substrates

Murali Sastry, M. S., Pattabi, Manjunatha
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Volume:
65
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.343337
File:
PDF, 403 KB
english, 1989
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