Quantitative Auger sputter depth profiling of very thin nitrided oxide
Barla, K., Nicolas, D., Pantel, R., Vuillermoz, B., Straboni, A., Caratini, Y.Volume:
68
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.346326
File:
PDF, 1.06 MB
english, 1990