Electrical properties of indium-tin oxide films deposited on nonheated substrates using a planar-magnetron sputtering system and a facing-targets sputtering system
Iwase, Hideo, Hoshi, Youichi, Kameyama, MakotoVolume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2134711
File:
PDF, 382 KB
english, 2006