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Liquid junctions for characterization of electronic materials. III. Modulation spectroscopies of reactive ion etching of Si
Shen, Wu-mian, Fantini, M. C. A., Pollak, Fred H., Tomkiewicz, Micha, Leary, Herbert J., Gambino, J. P.Volume:
66
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.344367
File:
PDF, 1024 KB
english, 1989