[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - A full-time accelerated vertical comb-driven micromirror for high speed 30-degree scanning
Tsuboi, O., Mi, X., Kouma, N., Okuda, H., Soneda, H., Ueda, S., Ikai, Y.Year:
2004
Language:
english
DOI:
10.1109/mems.2004.1290524
File:
PDF, 255 KB
english, 2004