Detection of oxygen vacancy defect states in capacitors with ultrathin Ta[sub 2]O[sub 5] films by zero-bias thermally stimulated current spectroscopy
Lau, W. S., Leong, L. L., Han, Taejoon, Sandler, Nathan P.Volume:
83
Year:
2003
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1616990
File:
PDF, 238 KB
english, 2003