Excited atomic and molecular states in reactive plasmas...

Excited atomic and molecular states in reactive plasmas used for titanium nitride deposition on steel surfaces

Ricard, A, Jacquot, P, Michel, H, Gantois, M
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Volume:
18
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/18/8/032
Date:
August, 1985
File:
PDF, 387 KB
english, 1985
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