[IEEE 2013 IEEE International Nanoelectronics Conference (INEC) - Singapore, Singapore (2013.01.2-2013.01.4)] 2013 IEEE 5th International Nanoelectronics Conference (INEC) - Through-silicon via fabrication with pulse-reverse electroplating for high density nanoelectronics
Lin, Nay, Miao, JianminYear:
2013
Language:
english
DOI:
10.1109/inec.2013.6466053
File:
PDF, 2.13 MB
english, 2013