[IEEE 2013 IEEE International Nanoelectronics Conference...

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[IEEE 2013 IEEE International Nanoelectronics Conference (INEC) - Singapore, Singapore (2013.01.2-2013.01.4)] 2013 IEEE 5th International Nanoelectronics Conference (INEC) - Through-silicon via fabrication with pulse-reverse electroplating for high density nanoelectronics

Lin, Nay, Miao, Jianmin
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Year:
2013
Language:
english
DOI:
10.1109/inec.2013.6466053
File:
PDF, 2.13 MB
english, 2013
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