Origin of dielectric loss induced by oxygen plasma on organo-silicate glass low-k dielectrics
Shi, H., Bao, J., Smith, R. S., Huang, H., Liu, J., Ho, P. S., McSwiney, M. L., Moinpour, M., Kloster, G. M.Volume:
93
Year:
2008
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3026528
File:
PDF, 395 KB
english, 2008