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[IEEE 2006 Sixth IEEE Conference on Nanotechnology - Cincinnati, OH, USA ()] 2006 Sixth IEEE Conference on Nanotechnology - Fabrication of Periodic Nanostructure in Nanoimprint Process
Fuh-Yu Chang,, Hung-Yi Lin,, Chun-Hway Hsueh,, Shuo-Hung Chang,, Tung-Chuan Wu,Year:
2006
Language:
english
DOI:
10.1109/nano.2006.247719
File:
PDF, 1.80 MB
english, 2006