Deposition of crystalline binary nitride films of tin,...

Deposition of crystalline binary nitride films of tin, copper, and nickel by reactive sputtering

Maya, Leon
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578778
Date:
May, 1993
File:
PDF, 622 KB
english, 1993
Conversion to is in progress
Conversion to is failed