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Deposition of crystalline binary nitride films of tin, copper, and nickel by reactive sputtering
Maya, LeonVolume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.578778
Date:
May, 1993
File:
PDF, 622 KB
english, 1993