Improvement of Stress Anisotropy in Circular Planar Magnetron Sputter Deposited Molybdenum Films with Annealing
Yong-Gang, Wu, Chun-Shi, Gu, Er-Hua, Cao, Zhan-Shan, Wang, Jun-Ming, Wei, Wei-Xing, Tang, Ling-Yan, ChenVolume:
19
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/19/7/326
Date:
July, 2002
File:
PDF, 363 KB
english, 2002