[IEEE 2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics - Freiburg, Germany (2008.08.11-2008.08.14)] 2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics - A glass cantilever beam sensor combined with a spherical reflecting mirror for sensitivity enhancement
Chun-da Liao,, Jui-che Tsai,Year:
2008
Language:
english
DOI:
10.1109/omems.2008.4607870
File:
PDF, 395 KB
english, 2008