Effect of deposition temperature and growth rate on the...

Effect of deposition temperature and growth rate on the bond structure of hydrogen free carbon films

Koskinen, J., Hirvonen, J.-P., Keränen, J.
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Volume:
84
Year:
1998
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.368091
File:
PDF, 332 KB
english, 1998
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