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Self-Separation of a Thick AlN Layer from a Sapphire Substrate via Interfacial Voids Formed by the Decomposition of Sapphire
Kumagai, Yoshinao, Tajima, Jumpei, Ishizuki, Masanari, Nagashima, Toru, Murakami, Hisashi, Takada, Kazuya, Koukitu, AkinoriVolume:
1
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.1.045003
Date:
April, 2008
File:
PDF, 976 KB
english, 2008