Effects of AlN nucleation layer thickness on crystal quality of AlN grown by plasma-assisted molecular beam epitaxy
Ren, Fan, Hao, Zhi-Biao, Hu, Jian-Nan, Zhang, Chen, Luo, YiVolume:
19
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/19/11/116801
Date:
November, 2010
File:
PDF, 2.21 MB
english, 2010