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Integrated mass spectrometer–microreactor system for the in situ investigation of oxide semiconductor sensors
Bene, R., Hárs, G., Perczel, I. V., Réti, F.Volume:
69
Year:
1998
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1149115
File:
PDF, 391 KB
english, 1998